XeF₂, XeF₄, and XeF₆ are obtained by a direct reaction between Xe and F₂. The condition under which the reaction is carried out determines the product.

Xe(g) + F₂(g) \(\overset{673K, 1bar}\longrightarrow\) XeF₂(s)

Xe(g) + 2F₂(g) \(\overset{873K, 7bar}\longrightarrow\) XeF₄(s)

Xe(g) + 3F₂(g) \(\overset{573K, 60-70bar}\longrightarrow\) XeF₆(s)